2/11/2010	4:53:19 PM	Program started normally
2/11/2010	4:54:06 PM	Program started after a nonstandard shutdown
2/11/2010	4:54:46 PM	Program started after a nonstandard shutdown
2/11/2010	4:55:12 PM	Program started after a nonstandard shutdown
2/11/2010	4:56:15 PM	Program started after a nonstandard shutdown
2/11/2010	4:56:22 PM	Bypass valve opened
2/11/2010	4:56:23 PM	Bypass valve closed
2/11/2010	4:56:28 PM	Helium valve opened
2/11/2010	4:56:35 PM	Helium valve closed
2/11/2010	4:56:39 PM	Helium MFC set to  0.000000
2/11/2010	4:56:41 PM	Helium valve opened
2/11/2010	4:56:44 PM	Helium valve closed
2/11/2010	4:57:15 PM	Program exited cleanly
2/11/2010	5:06:10 PM	Program started normally
2/11/2010	5:06:10 PM	Helium valve closed
2/11/2010	5:06:10 PM	H2 valve closed
2/11/2010	5:06:10 PM	BCl3 valve closed
2/11/2010	5:06:10 PM	PH3 valve closed
2/11/2010	5:06:10 PM	SiCl4 pre valve closed
2/11/2010	5:06:10 PM	SiCl4 post valve closed
2/11/2010	5:06:10 PM	Main Vac valve closed
2/11/2010	5:06:10 PM	Bypass valve closed
2/11/2010	5:06:10 PM	Bubbler valve closed
2/11/2010	5:06:10 PM	Helium MFC set to  0.000000
2/11/2010	5:06:10 PM	H2 MFC set to  0.000000
2/11/2010	5:06:10 PM	BCl3 MFC set to  0.000000
2/11/2010	5:06:10 PM	PHl3 MFC set to  0.000000
2/11/2010	5:06:10 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:06:10 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:06:10 PM	Tube furnace set to 0
2/11/2010	5:06:10 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:06:27 PM	Helium MFC set to  500.000000
2/11/2010	5:06:40 PM	Helium MFC set to  400.000000
2/11/2010	5:06:44 PM	Helium valve opened
2/11/2010	5:06:45 PM	Helium valve closed
2/11/2010	5:06:52 PM	Program started after a nonstandard shutdown
2/11/2010	5:06:52 PM	Helium valve closed
2/11/2010	5:06:52 PM	H2 valve closed
2/11/2010	5:06:52 PM	BCl3 valve closed
2/11/2010	5:06:52 PM	PH3 valve closed
2/11/2010	5:06:52 PM	SiCl4 pre valve closed
2/11/2010	5:06:52 PM	SiCl4 post valve closed
2/11/2010	5:06:52 PM	Main Vac valve closed
2/11/2010	5:06:52 PM	Bypass valve closed
2/11/2010	5:06:52 PM	Bubbler valve closed
2/11/2010	5:06:52 PM	Helium MFC set to  0.000000
2/11/2010	5:06:52 PM	H2 MFC set to  0.000000
2/11/2010	5:06:52 PM	BCl3 MFC set to  0.000000
2/11/2010	5:06:52 PM	PHl3 MFC set to  0.000000
2/11/2010	5:06:52 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:06:52 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:06:52 PM	Tube furnace set to 0
2/11/2010	5:06:52 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:06:58 PM	Helium MFC set to  0.000000
2/11/2010	5:06:59 PM	Helium valve opened
2/11/2010	5:07:00 PM	Helium valve closed
2/11/2010	5:07:13 PM	Helium MFC set to  500.000000
2/11/2010	5:07:14 PM	Helium valve opened
2/11/2010	5:07:15 PM	Helium valve closed
2/11/2010	5:07:20 PM	Helium MFC set to  500.000000
2/11/2010	5:07:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2010	5:07:51 PM	Helium valve closed
2/11/2010	5:07:51 PM	H2 valve closed
2/11/2010	5:07:51 PM	BCl3 valve closed
2/11/2010	5:07:51 PM	PH3 valve closed
2/11/2010	5:07:51 PM	SiCl4 pre valve closed
2/11/2010	5:07:51 PM	SiCl4 post valve closed
2/11/2010	5:07:51 PM	Main Vac valve closed
2/11/2010	5:07:51 PM	Bubbler valve closed
2/11/2010	5:07:51 PM	Bypass valve opened
2/11/2010	5:07:51 PM	Helium MFC set to  0.000000
2/11/2010	5:07:51 PM	H2 MFC set to  0.000000
2/11/2010	5:07:51 PM	BCl3 MFC set to  0.000000
2/11/2010	5:07:51 PM	PHl3 MFC set to  0.000000
2/11/2010	5:07:51 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:07:51 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:07:51 PM	Tube furnace set to 0
2/11/2010	5:07:51 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:08:11 PM	Helium valve closed
2/11/2010	5:08:11 PM	H2 valve closed
2/11/2010	5:08:11 PM	BCl3 valve closed
2/11/2010	5:08:12 PM	PH3 valve closed
2/11/2010	5:08:12 PM	SiCl4 pre valve closed
2/11/2010	5:08:12 PM	SiCl4 post valve closed
2/11/2010	5:08:12 PM	Bubbler valve closed
2/11/2010	5:08:12 PM	Main Vac valve opened
2/11/2010	5:08:12 PM	Bypass valve opened
2/11/2010	5:08:12 PM	Helium MFC set to  0.000000
2/11/2010	5:08:12 PM	H2 MFC set to  0.000000
2/11/2010	5:08:12 PM	BCl3 MFC set to  0.000000
2/11/2010	5:08:12 PM	PHl3 MFC set to  0.000000
2/11/2010	5:08:12 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:08:12 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:08:12 PM	Tube furnace set to 0
2/11/2010	5:08:12 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:08:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2010	5:10:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2010	5:10:03 PM	H2 valve closed
2/11/2010	5:10:03 PM	BCl3 valve closed
2/11/2010	5:10:03 PM	PH3 valve closed
2/11/2010	5:10:03 PM	SiCl4 pre valve closed
2/11/2010	5:10:03 PM	SiCl4 post valve closed
2/11/2010	5:10:03 PM	Main Vac valve closed
2/11/2010	5:10:03 PM	Bypass valve closed
2/11/2010	5:10:03 PM	Bubbler valve closed
2/11/2010	5:10:03 PM	Helium valve opened
2/11/2010	5:10:03 PM	Helium MFC set to  500.000000
2/11/2010	5:10:03 PM	H2 MFC set to  0.000000
2/11/2010	5:10:03 PM	BCl3 MFC set to  0.000000
2/11/2010	5:10:03 PM	PHl3 MFC set to  0.000000
2/11/2010	5:10:03 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:10:03 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:10:03 PM	Tube furnace set to 0
2/11/2010	5:10:03 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:11:02 PM	Program started after a nonstandard shutdown
2/11/2010	5:11:02 PM	Helium valve closed
2/11/2010	5:11:02 PM	H2 valve closed
2/11/2010	5:11:02 PM	BCl3 valve closed
2/11/2010	5:11:02 PM	PH3 valve closed
2/11/2010	5:11:02 PM	SiCl4 pre valve closed
2/11/2010	5:11:02 PM	SiCl4 post valve closed
2/11/2010	5:11:02 PM	Main Vac valve closed
2/11/2010	5:11:02 PM	Bypass valve closed
2/11/2010	5:11:02 PM	Bubbler valve closed
2/11/2010	5:11:02 PM	Helium MFC set to  0.000000
2/11/2010	5:11:02 PM	H2 MFC set to  0.000000
2/11/2010	5:11:02 PM	BCl3 MFC set to  0.000000
2/11/2010	5:11:02 PM	PHl3 MFC set to  0.000000
2/11/2010	5:11:02 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:11:02 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:11:02 PM	Tube furnace set to 0
2/11/2010	5:11:02 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:11:10 PM	Helium valve opened
2/11/2010	5:11:14 PM	Helium valve closed
2/11/2010	5:11:14 PM	Helium valve opened
2/11/2010	5:11:16 PM	Helium valve closed
2/11/2010	5:11:16 PM	Helium valve opened
2/11/2010	5:11:18 PM	Helium valve closed
2/11/2010	5:11:24 PM	Program exited cleanly
2/11/2010	5:11:27 PM	Program started normally
2/11/2010	5:11:27 PM	Helium valve closed
2/11/2010	5:11:27 PM	H2 valve closed
2/11/2010	5:11:27 PM	BCl3 valve closed
2/11/2010	5:11:27 PM	PH3 valve closed
2/11/2010	5:11:27 PM	SiCl4 pre valve closed
2/11/2010	5:11:27 PM	SiCl4 post valve closed
2/11/2010	5:11:27 PM	Main Vac valve closed
2/11/2010	5:11:27 PM	Bypass valve closed
2/11/2010	5:11:27 PM	Bubbler valve closed
2/11/2010	5:11:27 PM	Helium MFC set to  0.000000
2/11/2010	5:11:27 PM	H2 MFC set to  0.000000
2/11/2010	5:11:27 PM	BCl3 MFC set to  0.000000
2/11/2010	5:11:27 PM	PHl3 MFC set to  0.000000
2/11/2010	5:11:27 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:11:27 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:11:27 PM	Tube furnace set to 0
2/11/2010	5:11:27 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:11:39 PM	Helium MFC set to  0.000000
2/11/2010	5:11:42 PM	Program exited cleanly
2/11/2010	5:12:59 PM	Program started normally
2/11/2010	5:12:59 PM	Helium valve closed
2/11/2010	5:12:59 PM	H2 valve closed
2/11/2010	5:12:59 PM	BCl3 valve closed
2/11/2010	5:12:59 PM	PH3 valve closed
2/11/2010	5:12:59 PM	SiCl4 pre valve closed
2/11/2010	5:12:59 PM	SiCl4 post valve closed
2/11/2010	5:12:59 PM	Main Vac valve closed
2/11/2010	5:12:59 PM	Bypass valve closed
2/11/2010	5:12:59 PM	Bubbler valve closed
2/11/2010	5:12:59 PM	Helium MFC set to  0.000000
2/11/2010	5:12:59 PM	H2 MFC set to  0.000000
2/11/2010	5:12:59 PM	BCl3 MFC set to  0.000000
2/11/2010	5:12:59 PM	PHl3 MFC set to  0.000000
2/11/2010	5:12:59 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:12:59 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:12:59 PM	Tube furnace set to 0
2/11/2010	5:12:59 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:13:05 PM	Program exited cleanly
2/11/2010	5:16:09 PM	Program started normally
2/11/2010	5:16:09 PM	Helium valve closed
2/11/2010	5:16:09 PM	H2 valve closed
2/11/2010	5:16:09 PM	BCl3 valve closed
2/11/2010	5:16:09 PM	PH3 valve closed
2/11/2010	5:16:09 PM	SiCl4 pre valve closed
2/11/2010	5:16:09 PM	SiCl4 post valve closed
2/11/2010	5:16:09 PM	Main Vac valve closed
2/11/2010	5:16:09 PM	Bypass valve closed
2/11/2010	5:16:09 PM	Bubbler valve closed
2/11/2010	5:16:09 PM	Helium MFC set to  0.000000
2/11/2010	5:16:09 PM	H2 MFC set to  0.000000
2/11/2010	5:16:09 PM	BCl3 MFC set to  0.000000
2/11/2010	5:16:09 PM	PHl3 MFC set to  0.000000
2/11/2010	5:16:09 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:16:09 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:16:09 PM	Tube furnace set to 0
2/11/2010	5:16:09 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:17:01 PM	Recipe started at 5:17 PM
2/11/2010	5:17:01 PM	H2 valve closed
2/11/2010	5:17:01 PM	BCl3 valve closed
2/11/2010	5:17:01 PM	PH3 valve closed
2/11/2010	5:17:01 PM	SiCl4 pre valve closed
2/11/2010	5:17:01 PM	SiCl4 post valve closed
2/11/2010	5:17:01 PM	Main Vac valve closed
2/11/2010	5:17:01 PM	Bypass valve closed
2/11/2010	5:17:01 PM	Bubbler valve closed
2/11/2010	5:17:01 PM	Helium valve opened
2/11/2010	5:17:01 PM	Helium MFC set to  500.000000
2/11/2010	5:17:01 PM	H2 MFC set to  0.000000
2/11/2010	5:17:01 PM	BCl3 MFC set to  0.000000
2/11/2010	5:17:01 PM	PHl3 MFC set to  0.000000
2/11/2010	5:17:01 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:17:01 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:17:01 PM	Tube furnace set to 0
2/11/2010	5:17:01 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:17:56 PM	Program started after a nonstandard shutdown
2/11/2010	5:17:56 PM	Helium valve closed
2/11/2010	5:17:56 PM	H2 valve closed
2/11/2010	5:17:56 PM	BCl3 valve closed
2/11/2010	5:17:56 PM	PH3 valve closed
2/11/2010	5:17:56 PM	SiCl4 pre valve closed
2/11/2010	5:17:56 PM	SiCl4 post valve closed
2/11/2010	5:17:56 PM	Main Vac valve closed
2/11/2010	5:17:56 PM	Bypass valve closed
2/11/2010	5:17:56 PM	Bubbler valve closed
2/11/2010	5:17:56 PM	Helium MFC set to  0.000000
2/11/2010	5:17:56 PM	H2 MFC set to  0.000000
2/11/2010	5:17:56 PM	BCl3 MFC set to  0.000000
2/11/2010	5:17:56 PM	PHl3 MFC set to  0.000000
2/11/2010	5:17:56 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:17:56 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:17:56 PM	Tube furnace set to 0
2/11/2010	5:17:56 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:18:45 PM	Recipe started at 5:18 PM
2/11/2010	5:18:45 PM	H2 valve closed
2/11/2010	5:18:45 PM	BCl3 valve closed
2/11/2010	5:18:45 PM	PH3 valve closed
2/11/2010	5:18:45 PM	SiCl4 pre valve closed
2/11/2010	5:18:45 PM	SiCl4 post valve closed
2/11/2010	5:18:45 PM	Main Vac valve closed
2/11/2010	5:18:45 PM	Bypass valve closed
2/11/2010	5:18:45 PM	Bubbler valve closed
2/11/2010	5:18:45 PM	Helium valve opened
2/11/2010	5:20:14 PM	Helium MFC set to  500.000000
2/11/2010	5:20:14 PM	H2 MFC set to  0.000000
2/11/2010	5:20:14 PM	BCl3 MFC set to  0.000000
2/11/2010	5:20:14 PM	PHl3 MFC set to  0.000000
2/11/2010	5:20:14 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:20:14 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:20:14 PM	Tube furnace set to 0
2/11/2010	5:20:14 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:23:40 PM	Program started after a nonstandard shutdown
2/11/2010	5:23:40 PM	Helium valve closed
2/11/2010	5:23:40 PM	H2 valve closed
2/11/2010	5:23:40 PM	BCl3 valve closed
2/11/2010	5:23:40 PM	PH3 valve closed
2/11/2010	5:23:40 PM	SiCl4 pre valve closed
2/11/2010	5:23:40 PM	SiCl4 post valve closed
2/11/2010	5:23:40 PM	Main Vac valve closed
2/11/2010	5:23:40 PM	Bypass valve closed
2/11/2010	5:23:40 PM	Bubbler valve closed
2/11/2010	5:23:40 PM	Helium MFC set to  0.000000
2/11/2010	5:23:40 PM	H2 MFC set to  0.000000
2/11/2010	5:23:40 PM	BCl3 MFC set to  0.000000
2/11/2010	5:23:40 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:23:40 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:23:40 PM	Tube furnace set to 0
2/11/2010	5:23:40 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:23:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2010	5:23:47 PM	Helium valve closed
2/11/2010	5:23:47 PM	H2 valve closed
2/11/2010	5:23:47 PM	BCl3 valve closed
2/11/2010	5:23:47 PM	PH3 valve closed
2/11/2010	5:23:47 PM	SiCl4 pre valve closed
2/11/2010	5:23:47 PM	SiCl4 post valve closed
2/11/2010	5:23:47 PM	Main Vac valve closed
2/11/2010	5:23:47 PM	Bubbler valve closed
2/11/2010	5:23:47 PM	Bypass valve opened
2/11/2010	5:23:47 PM	Helium MFC set to  0.000000
2/11/2010	5:23:47 PM	H2 MFC set to  0.000000
2/11/2010	5:23:47 PM	BCl3 MFC set to  0.000000
2/11/2010	5:23:47 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:23:47 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:23:47 PM	Tube furnace set to 0
2/11/2010	5:23:47 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:24:06 PM	Helium valve closed
2/11/2010	5:24:06 PM	H2 valve closed
2/11/2010	5:24:06 PM	BCl3 valve closed
2/11/2010	5:24:06 PM	PH3 valve closed
2/11/2010	5:24:06 PM	SiCl4 pre valve closed
2/11/2010	5:24:06 PM	SiCl4 post valve closed
2/11/2010	5:24:06 PM	Bubbler valve closed
2/11/2010	5:24:06 PM	Main Vac valve opened
2/11/2010	5:24:06 PM	Bypass valve opened
2/11/2010	5:24:06 PM	Helium MFC set to  0.000000
2/11/2010	5:24:06 PM	H2 MFC set to  0.000000
2/11/2010	5:24:06 PM	BCl3 MFC set to  0.000000
2/11/2010	5:24:06 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:24:06 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:24:06 PM	Tube furnace set to 0
2/11/2010	5:24:06 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:24:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2010	5:24:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2010	5:24:28 PM	H2 valve closed
2/11/2010	5:24:28 PM	BCl3 valve closed
2/11/2010	5:24:28 PM	PH3 valve closed
2/11/2010	5:24:28 PM	SiCl4 pre valve closed
2/11/2010	5:24:28 PM	SiCl4 post valve closed
2/11/2010	5:24:28 PM	Main Vac valve closed
2/11/2010	5:24:28 PM	Bypass valve closed
2/11/2010	5:24:28 PM	Bubbler valve closed
2/11/2010	5:24:28 PM	Helium valve opened
2/11/2010	5:24:28 PM	Helium MFC set to  500.000000
2/11/2010	5:24:28 PM	H2 MFC set to  0.000000
2/11/2010	5:24:28 PM	BCl3 MFC set to  0.000000
2/11/2010	5:24:28 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:24:28 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:24:28 PM	Tube furnace set to 0
2/11/2010	5:24:28 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:25:51 PM	Helium valve closed
2/11/2010	5:25:51 PM	H2 valve closed
2/11/2010	5:25:51 PM	BCl3 valve closed
2/11/2010	5:25:51 PM	PH3 valve closed
2/11/2010	5:25:51 PM	SiCl4 pre valve closed
2/11/2010	5:25:51 PM	SiCl4 post valve closed
2/11/2010	5:25:51 PM	Main Vac valve closed
2/11/2010	5:25:51 PM	Bypass valve closed
2/11/2010	5:25:51 PM	Bubbler valve closed
2/11/2010	5:25:51 PM	Helium MFC set to  0.000000
2/11/2010	5:25:51 PM	H2 MFC set to  0.000000
2/11/2010	5:25:51 PM	BCl3 MFC set to  0.000000
2/11/2010	5:25:51 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:25:51 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:25:51 PM	Tube furnace set to 0
2/11/2010	5:25:51 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	5:25:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2010	5:27:12 PM	Program started after a nonstandard shutdown
2/11/2010	5:27:12 PM	Helium valve closed
2/11/2010	5:27:12 PM	H2 valve closed
2/11/2010	5:27:12 PM	BCl3 valve closed
2/11/2010	5:27:12 PM	PH3 valve closed
2/11/2010	5:27:12 PM	SiCl4 pre valve closed
2/11/2010	5:27:12 PM	SiCl4 post valve closed
2/11/2010	5:27:12 PM	Main Vac valve closed
2/11/2010	5:27:12 PM	Bypass valve closed
2/11/2010	5:27:12 PM	Bubbler valve closed
2/11/2010	5:27:12 PM	Helium MFC set to  0.000000
2/11/2010	5:27:12 PM	H2 MFC set to  0.000000
2/11/2010	5:27:12 PM	BCl3 MFC set to  0.000000
2/11/2010	5:27:12 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:27:12 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:27:12 PM	Tube furnace set to 0
2/11/2010	5:27:12 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:33:32 PM	Program exited cleanly
2/11/2010	5:33:33 PM	Program started normally
2/11/2010	5:33:33 PM	Helium valve closed
2/11/2010	5:33:33 PM	H2 valve closed
2/11/2010	5:33:33 PM	BCl3 valve closed
2/11/2010	5:33:33 PM	PH3 valve closed
2/11/2010	5:33:33 PM	SiCl4 pre valve closed
2/11/2010	5:33:33 PM	SiCl4 post valve closed
2/11/2010	5:33:33 PM	Main Vac valve closed
2/11/2010	5:33:33 PM	Bypass valve closed
2/11/2010	5:33:33 PM	Bubbler valve closed
2/11/2010	5:33:33 PM	Helium MFC set to  0.000000
2/11/2010	5:33:33 PM	H2 MFC set to  0.000000
2/11/2010	5:33:33 PM	BCl3 MFC set to  0.000000
2/11/2010	5:33:33 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:33:33 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:33:33 PM	Tube furnace set to 0
2/11/2010	5:33:33 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:34:02 PM	Program exited cleanly
2/11/2010	5:34:04 PM	Program started normally
2/11/2010	5:34:04 PM	Helium valve closed
2/11/2010	5:34:04 PM	H2 valve closed
2/11/2010	5:34:04 PM	BCl3 valve closed
2/11/2010	5:34:04 PM	PH3 valve closed
2/11/2010	5:34:04 PM	SiCl4 pre valve closed
2/11/2010	5:34:04 PM	SiCl4 post valve closed
2/11/2010	5:34:04 PM	Main Vac valve closed
2/11/2010	5:34:04 PM	Bypass valve closed
2/11/2010	5:34:04 PM	Bubbler valve closed
2/11/2010	5:34:04 PM	Helium MFC set to  0.000000
2/11/2010	5:34:04 PM	H2 MFC set to  0.000000
2/11/2010	5:34:04 PM	BCl3 MFC set to  0.000000
2/11/2010	5:34:04 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:34:04 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:34:04 PM	Tube furnace set to 0
2/11/2010	5:34:04 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:34:12 PM	Program exited cleanly
2/11/2010	5:34:16 PM	Program started normally
2/11/2010	5:34:16 PM	Helium valve closed
2/11/2010	5:34:16 PM	H2 valve closed
2/11/2010	5:34:16 PM	BCl3 valve closed
2/11/2010	5:34:16 PM	PH3 valve closed
2/11/2010	5:34:16 PM	SiCl4 pre valve closed
2/11/2010	5:34:16 PM	SiCl4 post valve closed
2/11/2010	5:34:16 PM	Main Vac valve closed
2/11/2010	5:34:16 PM	Bypass valve closed
2/11/2010	5:34:16 PM	Bubbler valve closed
2/11/2010	5:34:16 PM	Helium MFC set to  0.000000
2/11/2010	5:34:16 PM	H2 MFC set to  0.000000
2/11/2010	5:34:16 PM	BCl3 MFC set to  0.000000
2/11/2010	5:34:16 PM	SiCl4 MFC set to  0.000000
2/11/2010	5:34:16 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	5:34:16 PM	Tube furnace set to 0
2/11/2010	5:34:16 PM	Bypass solenoid MFC set to  760.000000
2/11/2010	7:39:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2010	7:39:57 PM	Helium valve closed
2/11/2010	7:39:57 PM	H2 valve closed
2/11/2010	7:39:57 PM	BCl3 valve closed
2/11/2010	7:39:57 PM	PH3 valve closed
2/11/2010	7:39:57 PM	SiCl4 pre valve closed
2/11/2010	7:39:57 PM	SiCl4 post valve closed
2/11/2010	7:39:57 PM	Main Vac valve closed
2/11/2010	7:39:57 PM	Bubbler valve closed
2/11/2010	7:39:57 PM	Bypass valve opened
2/11/2010	7:39:57 PM	Helium MFC set to  0.000000
2/11/2010	7:39:57 PM	H2 MFC set to  0.000000
2/11/2010	7:39:57 PM	BCl3 MFC set to  0.000000
2/11/2010	7:39:57 PM	SiCl4 MFC set to  0.000000
2/11/2010	7:39:57 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	7:39:57 PM	Tube furnace set to 0
2/11/2010	7:39:57 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	7:40:17 PM	Helium valve closed
2/11/2010	7:40:17 PM	H2 valve closed
2/11/2010	7:40:17 PM	BCl3 valve closed
2/11/2010	7:40:17 PM	PH3 valve closed
2/11/2010	7:40:17 PM	SiCl4 pre valve closed
2/11/2010	7:40:17 PM	SiCl4 post valve closed
2/11/2010	7:40:17 PM	Bubbler valve closed
2/11/2010	7:40:17 PM	Main Vac valve opened
2/11/2010	7:40:17 PM	Bypass valve opened
2/11/2010	7:40:17 PM	Helium MFC set to  0.000000
2/11/2010	7:40:17 PM	H2 MFC set to  0.000000
2/11/2010	7:40:17 PM	BCl3 MFC set to  0.000000
2/11/2010	7:40:17 PM	SiCl4 MFC set to  0.000000
2/11/2010	7:40:17 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	7:40:17 PM	Tube furnace set to 0
2/11/2010	7:40:17 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	7:40:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2010	7:50:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2010	7:50:21 PM	H2 valve closed
2/11/2010	7:50:21 PM	BCl3 valve closed
2/11/2010	7:50:21 PM	PH3 valve closed
2/11/2010	7:50:21 PM	SiCl4 pre valve closed
2/11/2010	7:50:21 PM	SiCl4 post valve closed
2/11/2010	7:50:21 PM	Main Vac valve closed
2/11/2010	7:50:21 PM	Bypass valve closed
2/11/2010	7:50:21 PM	Bubbler valve closed
2/11/2010	7:50:21 PM	Helium valve opened
2/11/2010	7:50:21 PM	Helium MFC set to  500.000000
2/11/2010	7:50:21 PM	H2 MFC set to  0.000000
2/11/2010	7:50:21 PM	BCl3 MFC set to  0.000000
2/11/2010	7:50:21 PM	SiCl4 MFC set to  0.000000
2/11/2010	7:50:21 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	7:50:21 PM	Tube furnace set to 0
2/11/2010	7:50:21 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	7:51:43 PM	Helium valve closed
2/11/2010	7:51:43 PM	H2 valve closed
2/11/2010	7:51:43 PM	BCl3 valve closed
2/11/2010	7:51:43 PM	PH3 valve closed
2/11/2010	7:51:43 PM	SiCl4 pre valve closed
2/11/2010	7:51:43 PM	SiCl4 post valve closed
2/11/2010	7:51:43 PM	Main Vac valve closed
2/11/2010	7:51:43 PM	Bypass valve closed
2/11/2010	7:51:43 PM	Bubbler valve closed
2/11/2010	7:51:43 PM	Helium MFC set to  0.000000
2/11/2010	7:51:43 PM	H2 MFC set to  0.000000
2/11/2010	7:51:43 PM	BCl3 MFC set to  0.000000
2/11/2010	7:51:43 PM	SiCl4 MFC set to  0.000000
2/11/2010	7:51:43 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	7:51:43 PM	Tube furnace set to 0
2/11/2010	7:51:43 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	7:51:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2010	7:52:15 PM	Helium valve opened
2/11/2010	7:52:20 PM	Helium valve closed
2/11/2010	7:52:24 PM	Helium MFC set to  500.000000
2/11/2010	7:52:25 PM	Helium valve opened
2/11/2010	7:52:29 PM	Bubbler valve opened
2/11/2010	8:12:01 PM	BCl3 valve opened
2/11/2010	8:12:45 PM	BCl3 MFC set to  1.000000
2/11/2010	8:13:14 PM	BCl3 MFC set to  5.000000
2/11/2010	8:22:38 PM	BCl3 valve closed
2/11/2010	8:31:24 PM	BCl3 valve opened
2/11/2010	8:35:20 PM	BCl3 MFC set to  0.000000
2/11/2010	8:35:21 PM	BCl3 valve closed
2/11/2010	8:40:03 PM	Bubbler valve closed
2/11/2010	8:40:04 PM	Helium valve closed
2/11/2010	8:40:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2010	8:40:29 PM	Helium valve closed
2/11/2010	8:40:29 PM	H2 valve closed
2/11/2010	8:40:29 PM	BCl3 valve closed
2/11/2010	8:40:29 PM	PH3 valve closed
2/11/2010	8:40:29 PM	SiCl4 pre valve closed
2/11/2010	8:40:29 PM	SiCl4 post valve closed
2/11/2010	8:40:29 PM	Main Vac valve closed
2/11/2010	8:40:29 PM	Bubbler valve closed
2/11/2010	8:40:29 PM	Bypass valve opened
2/11/2010	8:40:29 PM	Helium MFC set to  0.000000
2/11/2010	8:40:29 PM	H2 MFC set to  0.000000
2/11/2010	8:40:29 PM	BCl3 MFC set to  0.000000
2/11/2010	8:40:29 PM	SiCl4 MFC set to  0.000000
2/11/2010	8:40:29 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	8:40:29 PM	Tube furnace set to 0
2/11/2010	8:40:29 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	8:40:47 PM	Helium valve closed
2/11/2010	8:40:47 PM	H2 valve closed
2/11/2010	8:40:47 PM	BCl3 valve closed
2/11/2010	8:40:47 PM	PH3 valve closed
2/11/2010	8:40:47 PM	SiCl4 pre valve closed
2/11/2010	8:40:47 PM	SiCl4 post valve closed
2/11/2010	8:40:47 PM	Bubbler valve closed
2/11/2010	8:40:47 PM	Main Vac valve opened
2/11/2010	8:40:47 PM	Bypass valve opened
2/11/2010	8:40:47 PM	Helium MFC set to  0.000000
2/11/2010	8:40:47 PM	H2 MFC set to  0.000000
2/11/2010	8:40:47 PM	BCl3 MFC set to  0.000000
2/11/2010	8:40:47 PM	SiCl4 MFC set to  0.000000
2/11/2010	8:40:47 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	8:40:47 PM	Tube furnace set to 0
2/11/2010	8:40:47 PM	Bypass solenoid MFC set to  0.000000
2/11/2010	8:40:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2010	8:41:29 PM	BCl3 valve opened
2/11/2010	8:41:52 PM	BCl3 MFC set to  1.000000
2/11/2010	8:42:05 PM	BCl3 MFC set to  0.000000
2/11/2010	8:42:15 PM	BCl3 MFC set to  0.000000
2/11/2010	8:42:26 PM	BCl3 MFC set to  0.000000
2/11/2010	8:42:31 PM	BCl3 MFC set to  5.000000
